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应用无网格光滑粒子流体动力学(SPH)方法,建立了石英玻璃SPH模型,模拟了石英玻璃超精密切削过程,分析了 0.1~1.0 pm多组切削深度下材料去除模式和应变分布情况,以及不同刀具前角时切削过程中裂纹形成机理及其对超精密加工 过程的影响。仿真结果表明:石英玻璃能在微纳尺度上实现塑性域去除。通过研宄微裂纹与塑性应变的关系发现:在前角为 0°、切削速度10m/s、刀具钝圆半径0.1pm的仿真条件下,石英玻璃塑脆转变临界切削深度是0.18 pm;刀具负前角切削可 以得到更好的表面加工质量,说明负前角切削更适合石英玻璃超精密加工。金刚石飞切实验数据验证了 SPH仿真结果的合理性。 |
A smoothing particle hydrodynamics (SPH) model of quartz glass was established to simulate the ultra-precision cutting process of quartz glass by a mesh-free method for SPH. The material removal mode and strain distribution for the cutting depth of 0.1-1.0 pm were analyzed. The mechanism of crack formation and its influence on the ultra-precision machining process were discussed when the tools of different rake angles were used. The simulated results indicate that quartz glass can be machined in a ductile mode on the micro- and nanoscale. Based on the relation between micro-cracks and plastic strain, the critical cutting depth of brittle-ductile transition is confirmed, and the value is 0.18 pm under given simulated conditions (i.e., rake angle of 0°, cutting speed of 10 m/s and rounded cutting edge radius of 0.1 pm. The negative rake angle cutting tool can obtain a better surface quality, showing that the negative rake angle is more suitable for ultra-precision machining of quartz glass. Furthermore, the experimental results of diamond fly cutting is similar to the simulated results by SPH |